JPS6314281B2 - - Google Patents

Info

Publication number
JPS6314281B2
JPS6314281B2 JP57119480A JP11948082A JPS6314281B2 JP S6314281 B2 JPS6314281 B2 JP S6314281B2 JP 57119480 A JP57119480 A JP 57119480A JP 11948082 A JP11948082 A JP 11948082A JP S6314281 B2 JPS6314281 B2 JP S6314281B2
Authority
JP
Japan
Prior art keywords
pattern
inspection
area distribution
inspected
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57119480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS599505A (ja
Inventor
Mitsuyoshi Okada
Kenichi Geshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP57119480A priority Critical patent/JPS599505A/ja
Publication of JPS599505A publication Critical patent/JPS599505A/ja
Publication of JPS6314281B2 publication Critical patent/JPS6314281B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP57119480A 1982-07-08 1982-07-08 パタ−ン検査方法 Granted JPS599505A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57119480A JPS599505A (ja) 1982-07-08 1982-07-08 パタ−ン検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57119480A JPS599505A (ja) 1982-07-08 1982-07-08 パタ−ン検査方法

Publications (2)

Publication Number Publication Date
JPS599505A JPS599505A (ja) 1984-01-18
JPS6314281B2 true JPS6314281B2 (en]) 1988-03-30

Family

ID=14762330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57119480A Granted JPS599505A (ja) 1982-07-08 1982-07-08 パタ−ン検査方法

Country Status (1)

Country Link
JP (1) JPS599505A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6175205A (ja) * 1983-09-27 1986-04-17 Niyuurii Kk 異種模様の缶の検出方法及びその装置
JPH0619259B2 (ja) * 1984-03-31 1994-03-16 株式会社東芝 表面欠陥検査方法
JP2803930B2 (ja) * 1991-11-22 1998-09-24 株式会社三協精機製作所 円形パターン識別方法および装置
JP2563865B2 (ja) * 1992-05-29 1996-12-18 ラシキア・ワクタング 画像認識装置及び方法
JP4507523B2 (ja) * 2003-07-23 2010-07-21 富士ゼロックス株式会社 印刷物検査装置、及び印刷物検査プログラム

Also Published As

Publication number Publication date
JPS599505A (ja) 1984-01-18

Similar Documents

Publication Publication Date Title
US10496082B2 (en) Workpiece processing apparatus and workpiece transfer system
US4578810A (en) System for printed circuit board defect detection
US4500202A (en) Printed circuit board defect detection of detecting maximum line width violations
EP0028774B1 (en) Apparatus for detecting defects in a periodic pattern
JPH04252940A (ja) 物体端部の欠陥検査方法及びその装置
CA1261026A (en) Bottle mouth defect inspection apparatus
JPS6314281B2 (en])
JPH0375547A (ja) フロッピーディスクの検査方法
US6836561B2 (en) Method and system for detecting a defect in projected portions of an object having the projected portions formed in the same shape with a predetermined pitch along an arc
JPS63163150A (ja) プリント基板検査装置
JP2990820B2 (ja) 表面欠陥検査装置
JPS5855739A (ja) 物体、特に密封キヤツプの欠陥をチエツクする装置
JP2757800B2 (ja) 突起部検査装置
Morishita et al. Automated visual inspection systems for industrial applications
US6768544B1 (en) Method and a system for detecting impurities in a transparent material
JPH01207878A (ja) 輪郭検査装置
JP3130548B2 (ja) 画像処理装置
JPH043820B2 (en])
JPS6061604A (ja) パタ−ン検査装置
JPH075116A (ja) パターン検査装置
JP2001235428A (ja) 外観検査装置
JPS62229053A (ja) 核燃料用ペレツト端面の欠陥検査方法
JPH11306277A (ja) バーコードの読取方法およびバーコード読取装置
JPH05180618A (ja) 対象物の位置認識方法
JPS60210745A (ja) 視覚センサシステム